Analytical energy loss distribution for accurate high resolution depth profiling using medium energy ion scattering
نویسندگان
چکیده
منابع مشابه
High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultrathin high-k layers
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2008
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.2918443